Polymers for electronic applications
Lai, Juey H
A CRC technical reference on the use of polymers as resists in the fabrication of integrated circuits. A resist is the material in the pattern of a circuit that does down on the raw Silicon wafer. The wafer is treated to change the solubility of the material not under the resist, which "resists." The changed material is washed away. The work is primarily chemical with numerous graphs but it does not stint from mathematics where required
Categories:
Year:
1989
Edition:
1
Publisher:
CRC Press
Language:
english
Pages:
234
ISBN 10:
135107590X
ISBN 13:
9781351075909
File:
PDF, 6.42 MB
IPFS:
,
english, 1989