Rapid Thermal Processing of Semiconductors
Victor E. Borisenko, Peter J. Hesketh (auth.)Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
Categories:
Year:
1997
Edition:
1
Publisher:
Springer US
Language:
english
Pages:
358
ISBN 10:
148991806X
ISBN 13:
9781489918062
Series:
Microdevices
File:
PDF, 15.17 MB
IPFS:
,
english, 1997