VLSI metallization
Norman G Einspruch, Simon S Cohen, Gennady Sh GildenblatCategories:
Year:
1987
Publisher:
Academic Press
Language:
english
Pages:
480
ISBN 10:
0122341155
ISBN 13:
9780122341151
Series:
VLSI Electronics Microstructure Science 15
File:
PDF, 36.53 MB
IPFS:
,
english, 1987