The Physics of Micro/Nano-Fabrication

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The Physics of Micro/Nano-Fabrication

The Physics of Micro/Nano-Fabrication

Name: The Physics of Micro/Nano-Fabrication
ISBN: 9781475767759

Ivor Brodie, Julius J. Muray (auth.), Ivor Brodie, Julius J. Muray (eds.)

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In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

Categories:

Engineering

Year:

1992

Edition:

Publisher:

Springer US

Language:

english

Pages:

622

ISBN 10: